diff --git a/src/EcsWorld.cs b/src/EcsWorld.cs
index a07e9ab..fa2cae6 100644
--- a/src/EcsWorld.cs
+++ b/src/EcsWorld.cs
@@ -65,6 +65,8 @@ namespace DCFApixels.DragonECS
 
         private int[] _delEntBuffer = Array.Empty<int>();
         private int _delEntBufferCount = 0;
+        private int[] _emptyEntities = Array.Empty<int>();
+        private int _emptyEntitiesCount = 0;
         private bool _isEnableAutoReleaseDelEntBuffer = true;
 
         internal int _entityComponentMaskLength;
@@ -384,6 +386,7 @@ namespace DCFApixels.DragonECS
                 slot.gen |= GEN_SLEEP_MASK;
             }
             _entityListeners.InvokeOnNewEntity(entityID);
+            MoveToEmptyEntities(entityID);
         }
 
 
@@ -416,7 +419,7 @@ namespace DCFApixels.DragonECS
         public void DelEntity(int entityID)
         {
 #if DEBUG
-            if (IsUsed(entityID) == false) { Throw.World_EntityIsAlreadyСontained(entityID); }
+            if (IsUsed(entityID) == false) { Throw.World_EntityIsNotContained(entityID); }
 #elif DRAGONECS_STABILITY_MODE
             if (IsUsed(entityID) == false) { return; }
 #endif
@@ -426,6 +429,24 @@ namespace DCFApixels.DragonECS
             _entitiesCount--;
             _entityListeners.InvokeOnDelEntity(entityID);
         }
+        [MethodImpl(MethodImplOptions.AggressiveInlining)]
+        private void MoveToEmptyEntities(int entityID)
+        {
+            _emptyEntities[_emptyEntitiesCount++] = entityID;
+        }
+        [MethodImpl(MethodImplOptions.AggressiveInlining)]
+        private bool RemoveFromEmptyEntities(int entityID)
+        {
+            for (int i = _emptyEntitiesCount - 1; i >= 0; i--)
+            {
+                if(_emptyEntities[i] == entityID)
+                {
+                    _emptyEntities[i] = _emptyEntities[--_emptyEntitiesCount];
+                    return true;
+                }
+            }
+            return false;
+        }
         #endregion
 
         #region Other
@@ -821,13 +842,24 @@ namespace DCFApixels.DragonECS
         }
         public void ReleaseDelEntityBufferAll()
         {
-            ReleaseDelEntityBuffer(_delEntBufferCount);
+            ReleaseDelEntityBuffer(-1);
         }
         public unsafe void ReleaseDelEntityBuffer(int count)
         {
-            if (_delEntBufferCount <= 0) { return; }
+            if (_emptyEntitiesCount <= 0 && _delEntBufferCount <= 0) { return; }
             unchecked { _version++; }
 
+            for (int i = 0; i < _emptyEntitiesCount; i++)
+            {
+                TryDelEntity(_emptyEntities[i]);
+            }
+            _emptyEntitiesCount = 0;
+
+            if(count < 0)
+            {
+                count = _delEntBufferCount;
+            }
+
             count = Math.Max(0, Math.Min(count, _delEntBufferCount));
             _delEntBufferCount -= count;
             int slisedCount = count;
@@ -907,6 +939,7 @@ namespace DCFApixels.DragonECS
             SetEntityComponentMaskLength(CalcEntityComponentMaskLength()); //_pools.Length / COMPONENT_MASK_CHUNK_SIZE + 1;
             Array.Resize(ref _entities, newSize);
             Array.Resize(ref _delEntBuffer, newSize);
+            Array.Resize(ref _emptyEntities, newSize);
             Array.Resize(ref _entityComponentMasks, newSize * _entityComponentMaskLength);
 
             ArrayUtility.Fill(_entities, EntitySlot.Empty, _entitiesCapacity);
diff --git a/src/EcsWorld.pools.cs b/src/EcsWorld.pools.cs
index 357b891..d2216d5 100644
--- a/src/EcsWorld.pools.cs
+++ b/src/EcsWorld.pools.cs
@@ -278,7 +278,11 @@ namespace DCFApixels.DragonECS
             ref PoolSlot slot = ref _poolSlots[componentTypeID];
             slot.count++;
             slot.version++;
-            _entities[entityID].componentsCount++;
+            var count = _entities[entityID].componentsCount++;
+            if (count == 0 && IsUsed(entityID))
+            {
+                RemoveFromEmptyEntities(entityID);
+            }
             _entityComponentMasks[(entityID << _entityComponentMaskLengthBitShift) + maskBit.chunkIndex] |= maskBit.mask;
         }
         [MethodImpl(MethodImplOptions.AggressiveInlining)]
@@ -293,7 +297,7 @@ namespace DCFApixels.DragonECS
 
             if (count == 0 && IsUsed(entityID))
             {
-                DelEntity(entityID);
+                MoveToEmptyEntities(entityID);
             }
             CheckUnregisterValid(count, entityID);
         }
@@ -309,7 +313,11 @@ namespace DCFApixels.DragonECS
                 ref PoolSlot slot = ref _poolSlots[componentTypeID];
                 slot.count++;
                 slot.version++;
-                _entities[entityID].componentsCount++;
+                var count = _entities[entityID].componentsCount++;
+                if(count == 0 && IsUsed(entityID))
+                {
+                    RemoveFromEmptyEntities(entityID);
+                }
                 return true;
             }
             return false;
@@ -330,7 +338,7 @@ namespace DCFApixels.DragonECS
 
                 if (count == 0 && IsUsed(entityID))
                 {
-                    DelEntity(entityID);
+                    MoveToEmptyEntities(entityID);
                 }
                 CheckUnregisterValid(count, entityID);
                 return true;